Low-noise Si3N4 Membrane (50nm or thicker) on 5mm x 5mm Si/SiO2 chips (10 pieces) . 5 micron thick SiO2. Email for custom window size.
10 by 10 micron to 100 by 100 micron SiN membranes suspended on Si wafers (variable thicknesses, and chip sizes 3 x 3 mm, 5 x 5 mm or as specified)
